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Academician Ye Shenghua from Tianjin University, Professor Zeng Heping from East China Normal University, Zhou Changhe Research Fellow from Shanghai Institute of Optics and Technology, Prof. Luo Dongsheng from Beijing Optical Instrument Factory, and 11 experts from the Prof. Senior Engineer of the Beijing Optical Instrument Factory formed the meeting's Acceptance Technical Expert Group and Academician Ye Shenghua as the Expert Group Leader. . The acceptance meeting was chaired by the Deputy Director Mao Jianjun of the National Science and Technology Evaluation Center of the Ministry of Science and Technology, and Wei Minjie, Director of the Hubei Science and Technology Department attended the meeting.
The project leader Professor Liu Shiyuan made a detailed report on the completion of project implementation on behalf of the project team. At the time of acceptance of the project, key components and key technologies such as wideband achromatic compensator and high-precision double-rotation compensator synchronous control were developed, and 4 broad-spectrum generalized ellipsometric instruments with independent intellectual property rights were developed; international invention patents were authorized. 3, authorizing 29 domestic invention patents, 8 software copyrights, and 1 trademark right. Received 1 prize of the Geneva International Invention Award and published 50 SCI academic papers; 1 set of complete technical documents such as design drawings, engineering processes, and software codes; 1 set of quality and reliability protection plans; 1 built pilot production line, sales Instrument products 2 sets.
After the report was completed, the expert team reviewed the relevant materials on site and then went to the industrialization unit Wuhan Shuguang Technology Co., Ltd. to inspect the wide-spectrum generalized ellipsometry equipment product, conducted on-site testing and assessment of product indicators and performance, and completed the project. The situation and industrialization progress raised on-site questions. After careful discussion, the acceptance expert group believed that the implementation of the project was in good condition, completed the expected goals and reached all the assessment indicators, and agreed to pass the acceptance.
The ellipsometer is an important scientific instrument for measuring changes in the state of polarized light. The generalized ellipsometer (also known as the Mueller matrix ellipsometer) developed by this project represents the highest level of the ellipsometer and can measure a 44-step mu A total of 16 parameters are used in the matrix to obtain more extensive measurement information. The ellipsometer is widely used in basic scientific research and nano-manufacturing related industries such as material optical constants, nano-thin film thickness, and surface characterization, and its application scope covers integrated circuits, photovoltaic solar energy, flat panel displays, LED lighting, storage, biology, medicine, chemistry, Electrochemical, optical film and many other fields.
(Original title: "Development of broad-spectrum broad-spectrum ellipsometry equipment" passed the comprehensive inspection and acceptance of the project for the development of national major scientific instruments and equipment
"Broad-spectrum broad-spectrum ellipsometry equipment development" major special projects passed acceptance
China Instrument Network Instrument R&D On May 5, 2016, the Ministry of Science and Technology organized the first batch of national major scientific instrument and equipment development project “Development of Broad Spectrum Generalized Ellipsometer Equipment†(Project Number: 2011YQ160002) in Wuhan. . The project was led by Wuhan Acceleration Technology Co., Ltd., Huazhong University of Science and Technology for the instrument development technical support units, Wuhan Xinxin Semiconductor Manufacturing Co., Ltd., Wuhan Haoguang Photovoltaic Lighting Co., Ltd., and Wuhan Optoelectronics National Laboratory (chip) for application development. Unit, Wuhan Shuguang Technology Co., Ltd. is an industrialized unit.